Abstract
The advantages of scanning electron diffraction with electron energy filtering over conventional electron diffraction have been fairly widely described, and, more recently, the use of such systems in conjunction with transmission electron microscopes has been reported. By means of scanning diffraction, the electron intensities in a diffraction pattern may be measured and plotted directly on an XY recorder without the inaccuracy and inconvenience of the normal photographic-densitometric process; and the use of an energy filter to remove electrons that have suffered an energy loss allows direct measurement of the diffracted intensities of the elastically-scattered electrons. In this paper, we describe a Scanning Electron Diffraction Attachment (SEDA) with electrostatic energy filter that has been constructed for use with the AEI EM6 and EM8 series of electron microscopes.
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Schedule a callMore From: Proceedings, annual meeting, Electron Microscopy Society of America
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