Abstract
The local electric properties of lead zirconate titanate (PZT) film prepared by the aerosol deposition method (ADM) were investigated by scanning capacitance microscopy (SCM) using a self-sensing probe. Although an obvious ferroelectric response cannot be observed from macroscopic polarization versus applied electric field (P–E) measurements for the as-deposited PZT film, capacitance images showed a distinctive contrast as the result of the spatial variation of local dielectric permittivity. The scanning capacitance spectroscopy (SCS) measurements show that there are localized regions which have poor ferroelectricity, and this is the cause of the nominal ferroelectric properties of as-deposited PZT film.
Sign-in/Register to access full text options 
Free) 
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a call
