Abstract
Scanning Acoustic Microscopy (SAcM) has been widely used for non-destructive evaluation (NDE) in various fields such as material characterization, electronics, and biomedicine. SAcM uses high-frequency acoustic waves (60 MHz to 2.0 GHz) providing much higher resolution (up to 0.5 {micro}m) compared to conventional ultrasonic NDE, which is typically about 500 {micro}m. SAcM offers the ability to non-destructively image subsurface features and visualize the variations in elastic properties. These attributes make SAcM a valuable tool for characterizing near-surface material properties and detecting fine-scale flaws. This paper presents some recent applications of SAcM in detecting subsurface damage, assessing coatings, and visualizing residual stress for ceramic and semiconductor materials.
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