Abstract
A scanning probe technique is presented: Scanning μ-superconducting quantum interference device (SQUID) force microscopy (SSFM). The instrument features independent topographic and magnetic imaging. The force microscope uses a piezoelectric quartz tuning fork as the detector and magnetic imaging is obtained by scanning μ-SQUID microscopy. The μ-SQUID is placed at the edge of a silicon chip attached to the tuning fork. A topographic vertical resolution of 0.02 μm is demonstrated and magnetic flux as weak as 10−3 Φ0 is resolved with a 1 μm diameter μ-SQUID loop. The SSFM operates in a dilution refrigerator in a cryogenic vacuum. Sample and probe can be cooled to 0.45 K.
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