Abstract
Previous results on simulations of space-charge induced blur in electron projection systems indicated serious limitations on throughput particularly as minimum feature sizes (MFSs) are reduced below 100 nm. For example, a 40-cm-long 50 kV column might have a maximum throughput of only 0.2 cm2/s at MFS=50 nm [R. F. W. Pease et al., MNE, Italy, 1999]. Direct experimental verification is difficult, so we have developed a set of theory-based scaling laws for electron optics and have carried out a series of experiments for verifying these laws. Our experimental results support the earlier predictions and also confirmed that shortening the column length to the minimum allowed by the maximum practical focusing field strengths (e.g., 1 T and 107 V/m) should bring about dramatic (20- to 50-fold) improvements.
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