Abstract

Micro- and nano-scale systems are explained and are categorized in terms of heat and fluid flow phenomena. Some typical applications of nano- and micro-machines are presented. Heat and fluid flow phenomena of nano-micro spatio-temporal systems are described as follows.Micro-systems:· The size of the micro-machine element ranges from 1 µm to 1 mm.· The fluid motion and heat transfer can be treated as a continuum, and is described by Navier-Stokes equations and Fourier's law.Nano-systems:· The fluid cannot be treated as a continuum.· Discontinuity and wave characteristics of fluid and energy have to be considered.

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