SbOx Thin Films Used for Write-Once Blue Laser Recording

Abstract

SbOx thin films are deposited by reactive dc-magnetron sputteringfrom an antimony metal target in Ar+O2 with the relative O2content 7%. It is found that the as-deposited films can represent atwo-component system comprising amorphous Sb and amorphousSb2O3. The crystallization of Sb is responsible for thechanges of optical properties of the films. The results of the statictest show that the SbOx thin films have good writing sensitivityfor blue laser beams and the recording marks are very clear andcircular. High reflectivity contrast of about 41% is obtained at awriting power 6 mW and writing pulse width 300 ns. In addition, thefilms show a good stability after reading 10000 times.