Abstract
A surface acoustic wave (SAW) temperature and humidity sensor with high resolution is presented in this paper. The sensor is based upon a SAW delay-line oscillator which is implemented in a 128° rotated Y-Z LiNbO 3 substrate. Two SAW interdigital transducers (IDTs) for the delay line have been developed and analysed. The experimental frequency response of the oscillator is in good agreement with the theoretical analysis. The detection sensitivities of the temperature and humidity sensor for the single SAW delay line are −6 kHz/°C and −3 kHz/Rh%. The frequency response of the sensor is found to decrease nearly linearly with temperature or humidity. The sensitivity of a humidity sensor using temperature compensation is 3 kHz/RH%.
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