Abstract
This paper considers recent developments in surface acoustic wave sensors (SAWS) and illustrates the operating principle of both physical and chemical SAWS based on surface acoustic wave (SAW) propagation velocity variations. The SAWS that have appeared in the literature so far are qualitatively reviewed and compared with other existing sensors based on different working principles. It is concluded that for producing low-cost integrated SAWS for future applications, combined piezoelectric-silicon technology must be further developed.
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