Abstract
Polycrystalline diamond has emerged as a very promising material for high frequency surface acoustic wave (SAW) devices because it has a highest acoustic wave velocity amongst all materials. Theoretical studies with various types of piezoelectric materials were also performed. By LiNbO/sub 3//diamond structure, high electro-mechanical coefficient can be expected with high SAW velocity. Also zero temperature coefficient filter can be expected by additional amorphous SiO/sub 2/ deposition. The ZnO/diamond structure was successfully developed with late result on high frequency filter of 3.5 GHz by 0.75 /spl mu/m inter-digital transducers on diamond. The varieties of material systems on SAW and advanced devices based on diamond will find broad applications on high frequency devices in future communication systems.
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