Saturation-Volume Estimation for Multisegment Copper Interconnect Wires

Abstract

Recently, many physics-based electromigration (EM) models have been proposed to mitigate the over-conservativeness of existing Black–Blech-based EM models. To assess EM failures, one needs to estimate how the void grows after the nucleation phase. As a result, it is important to estimate the saturation volume of a void, which is important for EM mortality check. The existing saturation void volume model only works for a single wire segment. In this paper, we propose a new model for fast estimation of the void’s saturation volume for general multisegment interconnect wires. The new model is based on the fundamental atom conservation at the steady-state condition of void growth phases. The new formula agrees with the existing saturation void volume formula for the single-segment wire case and is a natural extension of the single-segment case to general multisegment wires. In addition, we consider the impacts of the void volume on final stress distributions of the wire to further improve the accuracy of the proposed formula. Based on the new formula, we propose a new EM immortality check flow, which considers both the recently proposed EM immortality in the void nucleation phase and the void saturation volume in the growth phase. The new flow can further reduce the conservativeness of the existing EM failure effect analysis. The numerical results show that the proposed formula agrees well with a published work for two-segment cases, which are supported by experimental data. The formula is also validated by the recently proposed physics-based 3-D finite-element (FEM) analysis tool for general multisegment interconnect wires. We also demonstrate new EM immortality check flow to quickly identify the new type of immortal wires, which are nucleated but with smaller-than-critical voids.