Abstract
A sandwich structure type RF-MEMS variable capacitor is proposed, that consists of a movable middle plate, and fixed top and bottom plates having different areas. Simulation results show that the proposed capacitor can operate at a control voltage of less than 3.2V; it achieves a tuning range of 4.8:1 (capacitance: 630-130fF) in the range of 0 to 3.2V and at a frequency of 7.5GHz.
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