Abstract
For capacitive sensors, alternative electric testing signals are needed for detecting the variation of capacitance. Due to the electrostatic force of the testing signal, the seismic mass of the sensor may be pulled into contact with the static electrode. In this paper, safe operation ranges for capacitive accelerometers with light damping for dynamic inertial signals (step and pulse signals) are investigated for single- and double-sided configurations. The results show that the safe signal level of step inertial signal is smaller than that of quasi-static signal by a factor of 0.5 to 0.7. For pulse inertial signal, the safe operation condition is dependent on the product of the amplitude and the time duration of the pulse.
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