Abstract
A highly precise positioning actuator for a Scanning Prove Microscopy (SPM) and a magnetic recording evaluation system has been developed. The positioning actuator call the Nano-Motion Actuator (NMA) that is consisted of a displacement amplifier mechanism and a stacked piezoelectric element. In this paper, we propose a new two dimensional positioning actuator call the Nano-Motion Stage (NMS) that is composed of two pair of piezoelectric actuators, parallel links with square support spring and a positioning stage. The control performance and the positioning accuracy are verified. Furthermore, the influence of the tracking actuator on the transient response and the out-of-plane moments of the precise positioning stage with a stacked piezoelectric element has been discussed.
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