Abstract
In this paper, we described the polishing performance of glass and various materials using the epoxy resin polishing pad that can improve the stagnation of abrasives on the polishing pad. The epoxy resin and epoxy-urethane resin polishing pad showed higher removal rate and lower surface roughness than a conventional urethane resin polishing pad. We also investigated the double-sided polishing characteristics and found that the epoxy resin polishing pad could markedly improve the stagnation of abrasives especially on the upper side lap plate. The epoxy resin polishing pad also achieved higher polishing performance of Si, sapphire and metal workpiece.
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