Abstract
In a previous work, we developed a new type laser microscope that has features of confocal scanning type and wide field of view. This new type of laser microscope was applied to detection of micro/nano-fine flaws over a wide area of 8 x 10mm on metal or glass surfaces. Several micro fine flaws were produced on stainless steel by scratching the surfaces with a diamond stylus. The fine flaws on the metal surfaces were able to be seen through the laser microscope we developed. Furthermore, submicrometer-flaws were produced on Si substrate or cylindrical-glass surface by focused ion beam technique, FIB. The surfaces containing those micro/nano flaws were observed with the laser microscope and the flaws on the Si substrate could be seen. It can be said that the flaws on the glass surface is slightly difficult to observe than those on the metal surfaces due to the wavelength of the laser we used.
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