S114043 走査型プローブ顕微鏡におけるアコースティックエミッションの検出方法の提案([S114-04]トライボロジーの基礎と応用(4))

Abstract

When using scanning probe microscope, the acoustic emission (AE) signal can be detected, which is caused by friction and wear, with receiving AE wave by piezo electric scanner. The signal of scanner wiring is mixture between AE signal and scan signal. So the AE signal can be detected by using high pass filter in the. Since AE wave also affects interaction between probe and surface, the probe signal contains AE signal, where in this case also the AE signal can be detected by using high pass filter to the probe signal. Because above two AE signal detection methods are independent, the two methods can use simultaneously, which might make the precision of the detected AE signal better.