S1105-2-2 CVD TiC/TiN膜とTiC膜のマイクロスラリージェットエロージョン(MSE)試験(表面改質とトライボロジー2)

Abstract

A slurry containing 1.2μm alumina particles was impacted at high velocity perpendicular to CVD TiC/TiN (TiN on top of TiC) and TiC coatings deposited on cemented carbide using a Micro Slurry-jet Erosion (MSE) tester. In addition, nano-indentation and XRD, GDOES, AFM analyses were done for the original and worn surfaces. For the TiC/TiN coating, the wear depth of the TiN layer increased linearly until the TiC layer was reached. There after the wear occurred at a lower rate but tended to increase gradually towards the TiC/substrate interlayer. The single layered TiC coating showed the same wear behaviour as the TiC layer of the TiC/TiN coating. The micro topographies of the worn surfaces observed by AFM correlated to the difference in the wear rate of the individual layers and the change in wear rate at the interface to the substrate. The TiC layer proved to have about two times higher wear resistance than the TiN layer.