Abstract
The energy distribution of ions striking the substrate in low pressure inductively coupled Ar/N2 plasmas is studied by using COMSOL Multiphysics in this paper. The equation of motion for ions involving the ion-neutral collisions with charge exchange in the sheath region of the substrate is solved on the basis of the simulation of plasma discharges. The effect of dc bias and gas flow rate on ion energy distribution is presented. The results demonstrate that the controlling of dc bias and gas flow rate would control the energy distribution of ions arriving at the substrate.
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