Abstract
In semiconductor manufacturing, a new pneumatic non-contact handling device is developed. This device named Vortex Cup makes use of a negative pressure at a central area of swirling flow in order to hold the wafer and to prevent significant wafer damage and foreign material contamination. The Cup provides lower-cost, higher-performance than other pneumatic type devices, but has a problem that periodic pressure fluctuation is caused when the gap height between the work and the Cup becomes large. This problem causes the work falling or the work collision against the cup. In this report, we proposed simple method for suppression of the pressure fluctuation by using cylinders set into the cup. As a result, it was revealed that the cylinder diameter has great effect on the fluctuation suppression, but the height has little influence on it. PIV measurement clarified that the meandering motion of swirling flow in a cup was disappeared when the pressure fluctuation was suppressed.
Sign-in/Register to access full text options 
Free) 
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a call
