S-Curve Engineering for ON-State Performance Using Anti-Ferroelectric/Ferroelectric Stack Negative-Capacitance FinFET

Abstract

This work investigates the S-curve engineering by exploiting the anti-ferroelectric (AFE)/ferroelectric (FE) stack negative-capacitance FinFET (NC-FinFET) to improve both the subthreshold swing and ON-state current ( I <sub xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">ON</sub> ). The capacitance matching and ON-state performance are evaluated using a short-channel AFE/FE stack NC-FinFET model. Our study indicates that the AFE/FE gate-stack can theoretically achieve surprising improvements to the OFF-state current ( I <sub xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">OFF</sub> ) and I <sub xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">ON</sub> relative to International Roadmap for Devices and Systems (IRDS) projections. There is a significant long-term advantage to integrated circuit (IC) power consumption and speed if materials with certain AFE and FE characteristics can be developed and introduced into IC manufacturing.