Abstract
This paper reports on a method for improving the optical efficiency of micromachined reflectors integrated in rubidium vapor cells. A hybrid bulk micromachining and multilayer thin film process is used to form the reflectors on angled sidewalls, which redirect laser light through the vapor cell and back toward the plane of the source with reduced optical power loss. The optical return efficiency of two paired dielectric reflectors is shown to be improved by as much as eight times over silicon reflectors alone. The D1 absorption line in a one cubic millimeter miniature alkali 87 Kb vapor cell by use of two integrated thin film reflectors is experimentally demonstrated.
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