RTS noise in submicron SiGe epitaxial base bipolar transistors

Abstract

In this paper, we report a comprehensive study of Random Telegraph Signal (RTS) noise in SiGe epitaxial base bipolar transistors. We analyse the multilevel fluctuations of base and emitter forward currents before and after reverse stress on the emitter-base junction. We show the influence of the chemical treatment preceeding polysilicon emitter deposition on noise properties. We identified that RTS noise arises from different regions in the device : the silicon/polysilicon interface if an oxidizing surface preparation is used, and the emitter periphery after stress-induced degradation. Temperature and bias dependent measurements allowed us to characterize these defects (activation energy, defect type), to analyse their impact to the low frequency noise properties of these transistors and to discuss the role of hot carrier stressing.