Round robin study of chlorine, sulfur and carbon in copper films from Taiwan SIMS users

Abstract

The round robin study of reference standards of 35 Cl , 32 S and 12 C implanted into Cu films using five SIMS instruments from Taiwan SIMS users was attempted. Significant differences in RSFs but similarity in maximum peak concentration among different instruments was observed. For 35 Cl , 32 S and 12 C measured using Cameca ims-6f, the RSF is 3.67E+19, 5.44E+20, 4.24E+21, the detection limit is 2.5E+16, 3.17E+16, 2.34E+18, and the dynamic range is 8.11E+3, 2.22E+4, 2.3E+1, respectively. The exchangeable use of RSF is recommended among model-specific instruments.