Abstract
Roughness measurements in the picometric range using a polarization interferometer and a multichannel lockin detection technique
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https://doi.org/10.1016/s0890-6955(97)00122-3
Publication Date: May 1, 1998 | |
Citations: 7 |
Roughness measurements in the picometric range using a polarization interferometer and a multichannel lockin detection technique
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