Abstract
Roughness development is one of the most often addressed issues in the secondary ion mass spectrometry (SIMS) ultra-shallow depth profiling. The effect of oxygen flooding pressure on the roughness development has been investigated under the bombardment of 500 eV O 2 + beam with simultaneous sample rotation. Oxygen flooding had two competing effects on the surface roughening, i.e., enhancement of initiating roughening and suppression of roughening development, which were suggested to be described by the onset depth z on and transient width w tr of surface roughening. Both z on and w tr decreased as oxygen flooding pressure increased. As the result, surface roughening was most pronounced at the intermediate pressure from 4.4E−5 Pa to 5.8E−5 Pa. The surface roughening is negligible while without flooding or with flooding at the saturated pressure. No flooding is preferable for depth profiling ultra-shallow B implantation because of the better B profile shape and short analysis time.
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Disclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.