Abstract

An active control system is incorporated into an air-bearing spindle designed for ultraprecision applications. The system uses the Active Inherent Restrictor (abbreviated AIR) for improving the rotational accuracy of the spindle. The AIR consists of a piezoelectric actuator having a hole, one end of which on the bearing surface acts as an inherent restrictor. According to the spindle vibration detected, the AIR controls the airflow rate, and reduces the amplitude of the vibration to less than 10nm. The control system also has the ability of positioning the spindle; one nanometer of step is clearly resolved. Therefore, this air-bearing spindle with the AIR can be used as an ultraprecision positioning device.

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