Year-end Sale % OFF 
Abstract
This paper describes a rotary, linear motion feedthrough. This was designed and built to permit film deposition from a source located below the substrate and subsequent rotation by 180° and translation of 3 in. This combination of motions was required for the film deposition and subsequent movement of the substrate and thin film into position to form one plate of a vibrating capacitor.
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a callDisclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.
