Abstract

This manuscript reports room-temperature one-step synthesis of earth-abundant semiconductor ZnSiN2 on amorphous carbon substrates using radio frequency reactive magnetron co-sputtering. Transmission Electron Microscopy and Rutherford Backscattering Spectrometry analysis demonstrated that the synthesis has occurred as ZnSiN2 nanocrystals in the orthorhombic phase, uniformly distributed on amorphous carbon. The technique of large-area deposition on an amorphous substrate can be interesting for flexible electronics technologies. Our results open possibilities for environmentally friendly semiconductor devices, leading to the development of greener technologies.

Highlights

  • Semiconductor materials can be considered one of the technology pillars of contemporaneous life

  • We report room-temperature one-step synthesis of earth-abundant and non-toxic semiconductor ­ZnSiN2 on amorphous carbon by using radio frequency (RF) reactive magnetron co-sputtering

  • We would like to emphasize that annular dark-field (ADF)-STEM mode was intentionally applied to maximize contrast-diffraction effects, which is possible because those nanostructures have a clear crystalline character

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Summary

Introduction

Semiconductor materials can be considered one of the technology pillars of contemporaneous life. Studies on green technologies are quite ­recent[17] and take into consideration the long-term demand of ­elements[18] and its environmental impacts in the near ­future[19,20] Exploring these aspects, scientists have paid attention to ­abundance[21] and toxicity of elements for materials synthesis, aiming various a­ pplications[10,22,23,24,25]. Our synthesis brings new perspectives to synthesize Z­ nSiN2 without the need for expensive or complex substrate preparation or thermal treatment process This process has the advantage to allow large-scale/large-area synthesis, even on an amorphous substrate, a strong point to applications in macro e­ lectronics[40,41] taking into account environmentally friendly c­ oncepts[42]

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