Abstract
This paper presents a monolithic resonant room-temperature CMOS terahertz (THz) thermal detector composed of a strong metamaterial absorber and an optimized PTAT sensor. The overall design considerations, as well as relatively better characterization results are demonstrated at 4.3THz for the natural atmospheric window. At present, a 4.2THz quantum cascade laser (QCL) is used to obtain performances of the detector due to the accessible THz source. The proposed detector achieves a maximum responsivity of 20.9V/W and a minimum noise equivalent power of <tex xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">$6.1 \mu\mathrm{W}/\text{Hz}^{0.5}$</tex> at 4.2THz.
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