Abstract
Layers of ZnSe (50, 110 and 160 nm thick) are deposited at room substrate temperature by thermal evaporation of ZnSe powder in vacuum. As-deposited and relaxed layers are investigated by spectroscopic ellipsometry to get information about their optical properties, porosity and surface roughness. The obtained data indicate that all layers are nanocrystalline and the lattice relaxation causes a porosity decrease and surface roughness increase. Ethanol sensing experiments are carried out at room temperature in air and results show an increase of the layers sensitivity with decreasing thickness while the relaxation causes sensitivity decrease. The sensitivity behavior is discussed considering the changes in the films porosity and the ethanol related decrease of the potential barriers at the nanocrystallite interfaces.
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