Room temperature diamond-like carbon coatings produced by low energy ion implantation

Abstract

Nanometre-smooth diamond-like carbon coatings (DLC) were produced at room temperature with ion implantation using 6kV C3Hy+ ion beams. Ion beam analysis measurements showed that the coatings contain no heavy Z impurities at the level of 100ppm, have a homogeneous stoichiometry in depth and a hydrogen concentration of typically 25at.%. High resolution TEM analysis showed high quality and atomically flat amorphous coatings on wafer silicon. Combined TEM and RBS analysis gave a coating density of 3.25gcm−3. Raman spectroscopy was performed to probe for sp2/sp3 bonds in the coatings. The results indicate that low energy ion implantation with 6kV produces hydrogenated amorphous carbon coatings with a sp3 content of about 20%. Results highlight the opportunity of developing room temperature DLC coatings with ion beam technology for industrial applications.