Abstract
In the present work, we report the deposition of vanadium pentoxide (V2O5) thin film on the quartz crystal microbalance (QCM) using vacuum thermal evaporation method followed by rapid thermal annealing (RTA) in oxygen atmosphere (O2),for gas sensing application. The structure, morphology and surface wettability of the obtained thin film were characterized by X-ray diffraction (XRD), scanning electron microscopy (SEM), atomic force microscopy (AFM) and contact angle measurement (CA). The results show that the elaborated structure has a porous, rough and hydrophilic characteristic with a pure V2O5 phase in form of nanopaltelets. The sensing properties of V2O5 nanopaltelets /QCM structure were evaluated towards NH3 vapor at room temperature. The result revealed that the sensor exhibited good sensing performance: a fast response time, a short recovery time, good stability, reproducibility, reversibility and linearity.
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