Abstract
In order to meet the price target necessary for widespread use of solar cell products, Energy Conversion Devices, Inc., ECD, has developed and commercialized a continuous roll-to-roll manufacturing technology for the production of a-Si alloy solar cells. Since the early 1980s, we have advanced this technology from a small-scale pilot machine to a large-scale production machine. In 2002, ECD commissioned a 30 MW per year machine for United Solar Systems Corp. in Auburn Hills, Michigan. The RF PECVD a-Si alloy solar cell processor, designed and built by ECD, deposits triple-junction solar cell materials consisting of nine layers of a-Si alloys in a continuous roll-to-roll operation simultaneously on six coils of 130 μm thick, 0.36 m wide, 2.6 km long stainless-steel substrate at 1 cm/s. In order to minimize production losses due to undetected deviations of production conditions and carry on a continuous program of device optimization, we have developed and are incorporating in situ cell performance diagnostic systems.
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