Abstract
Metal oxide semiconductor (MOS) nanomembranes hold a great potential for electronic devices. In this work, tubular SnO2 nanomembranes were fabricated by the rolled-up technology and investigated as the sensing element for chemiresistive gas sensors. Due to the high accessibility to both surfaces of nanomembranes and the large amount of adsorbed oxygen species, the sensor based on SnO2 nanomembranes displayed high and fast response for selective detection of acetone, as well as good repeatability, stability and low detection limit of ppb-level. The very good sensing performances derived from the tubular nanomembrane structure suggests a new platform that can be used for chemical gas sensors. This work will drive the integration of tubular MOS nanomembranes into a real microsensor based on the lab-in-tube concept.
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