Abstract
This work examines the modelling and potential formation of submicron ferroelectric pillars which are exploited as an active component of modern 1–3 piezocomposites. These structures are of interest in sensor and actuator technologies, and most notably energy harvesting devices. This research area has seen recent growth in terms of interest with the advent of electronics with greater portability and wireless sensors. The fabrication of nanopillars on the single crystal surface is investigated using a nanoimprint lithography (NIL) approach. The use of a disposable master allows the user to reproduce large-area nanostructures and dry etching then allows for the nanopillars to be formed. Results on the prediction of effective electromechanical properties of 1–3-type composites either LiNbO3 single crystal or (1 – x)Pb(Mg1/3Nb2/3)O3 – xPbTiO3 (PMN-PT) single crystal are given for comparison.
Published Version
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