Abstract

Thin ferroelectric Pb(Zr0.48Ti0.52)O3 lead zirconate titanate films have been prepared on platinized silicon substrates via chemical solution deposition. The starting film-forming solutions were prepared by reacting lead acetate with Ti and Zr alkoxides in 2-methoxyethanol. The electrical properties of the films were shown to depend on the Ti and Zr alkoxide precursors used in synthesis. The nature of the zirconium alkoxide had the strongest effect on the properties of the films. The best properties were obtained with zirconium n-propoxide.

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