Abstract
Super-resolution technology is important not only in bio-related fields but also in nanotechnology, particularly in the semiconductor industry, where fine patterning is required and super-resolution is essential. However, observing microstructures beyond the diffraction limit proposed by Abbe and Rayleigh is considered impossible because of diffraction in traditional optical microscopy observation techniques. However, in recent years, it has been possible to observe microstructures beyond the Rayleigh criterion by analysing the phase distribution of light. This study investigated the physical reasons why phase analysis makes this new analysis technique possible using simulations. The results confirmed that the phase component of the zero-order diffracted light reflected from the microstructure and able to pass through the lens system contained phase information related to the shape of the measured object. Analysis of this information demonstrates the possibility of realising super-resolution based on speckle interferometry.
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