Abstract

Aluminum doped zinc oxide (ZAO) films were prepared by sol gel dip-coating process. Several annealing treatments were carried out to improve the conductivity of ZAO films. The results show that the annealing temperature and the cooling rate have significant effects on the resistivity of ZAO films. A minimum resistivity of 5.97×10−3Ωcm with the transmission in visible light region above 85% can be obtained after vacuum annealing. The desorption of oxygen that is chemisorbed on the surface and at the grain boundary is thought to be responsible for the observed improvement.

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