Role of excitation frequency in a low-pressure, inductively coupled radio-frequency, magnetized plasma

Abstract

We have experimentally studied the role of the excitation frequency frf in a low-pressure, inductively coupled radio-frequency (rf), magnetized plasma. Planar Langmuir probe measurements of the electron energy distribution function and the plasma density ne clearly demonstrate a sudden change in the nature of plasma-rf coupling as frf approaches the electron cyclotron frequency fce from below or above. The observed mode change is qualitatively explained by different wave coupling mechanism for frf<fce and frf≳fce. These observations could have important applications for plasma processing.