Abstract
AgInSbTe film was deposited on alkali-free glass using the radio-frequency sputtering method. Variations in sheet resistance with annealing temperatures were accompanied by the crystallization of amorphous films. Grazing-incidence X-ray diffractometer and transmission electron microscopy observations indicated amorphous characteristics for as-deposited films and the crystallized δ-Sb and AgSbTe 2 phases for annealed films. The transition temperature of sheet resistance is around 150–160 °C, which is lower than the crystallization temperature obtained by differential scanning calorimetry.
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