Abstract

In this paper, the problem of velocity control of a micro-robot’s locomotion with nanometric resolution has been investigated. A sliding, A-shaped micro-robot, used in precision positioning applications is analyzed. This micro-robot is actuated by means of a piezoelectric stack actuator in order to produce translational and periodic motion. A dynamic model of the robot is proposed assuming linear behavior for the piezoelectric stack and Coulomb friction model. Then, in order to control the velocity of micro-robot, first a robust sliding mode control is used so that the relative angle between the legs in the micro-robot tracks a periodic reference signal. The velocity tracking for the micro-robot is achieved using an amplitude modulation strategy by adapting the amplitude of this reference signal. Velocity control of locomotion is assumed to be in the presence of a non-separation constraint (between the legs and the substrate) and friction uncertainties. Also, a state observer is designed to estimate the rate of change of the relative angle between the legs of the micro-robot, which is needed in the velocity control algorithm. Finally, simulation results are presented which illustrate the effectiveness of the proposed control strategy.

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