Abstract
This paper presents a robust tracking control strategy using an adaptive sliding mode approach for MEMS triaxial angular sensor device that is able to detect rotation in three orthogonal axes, using a single vibrating mass. An adaptive sliding mode controller with proportional and integral sliding surface is developed and the stability of the closed-loop system can be guaranteed with the proposed adaptive sliding mode control strategy. The proposed adaptive sliding mode controller updates estimates of all stiffness errors, damping, and input rotation parameters in real time, removing the need for any offline calibration stages. To enable all unknown parameter estimates to converge to their true values, the necessary model trajectory is shown to be a three-dimensional Lissajous pattern. The numerical simulation for a MEMS triaxial angular velocity sensor is investigated to verify the effectiveness of the proposed adaptive sliding mode control scheme.
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