Robust shape-based template matching algorithm for target localization under SEM.

Abstract

A novel acceleration algorithm for geometric template matching is proposed based on the Cauchy-Schwartz inequality (C-S inequality) in this paper. The proposed approach is validated under a scanning electron microscope (SEM), and its effectiveness is demonstrated. In this approach, the object shape features are represented as column vectors with complex elements. Then, a threshold is determined to exclude the sliding windows without any matched objects. Finally, surface fitting is employed to obtain the subpixel positions of the targets, and least squares adjustment is utilized to fine-tune the obtained results. The experimental results demonstrate that the proposed method can significantly reduce the matching time by 59% - 96% compared with the traditional shape-based method. Furthermore, the strong robustness and high accuracy are verified under different disturbances. Additionally, the approach is shown to be robust and accurate under different types of disturbances, thus confirming its suitability for real-time targets tracking on SEM with high accuracy.