Abstract
The research work carried out in this paper introduces a robust design method for layout synthesis of MEM resonator subject to inherent geometric uncertainties such as the fabrication error on the sidewall of the structure. The robust design problem is formulated as a multi-objective constrained optimization problem with certain assumptions and treated by a special constrained genetic algorithm. The MEM design used for validation is a crab-leg resonator taken from the literature. The results show that the approach proposed in this research can lead to design results that meet the target performance and are less sensitive to geometric uncertainties than typical designs.
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