Robust incident angle calibration of angle-resolved ellipsometry for thin film measurement.

Abstract

Angle-resolved ellipsometry with back focal plane imaging has been found to be of increasing importance in recent industrial sensing by virtue of its rich information provided at various incident and azimuthal angles. To achieve high sensing accuracy, the incident angles of a back focal plane must be accurately calibrated. For this purpose, a simple and robust incident angle calibration method based on full-field Brewster angle fitting is proposed, without expensive tools or complex operations. With this method, a back focal plane image is first captured from boundary reflectance through a high-numerical-aperture objective. By extracting annular data from the image, radius-dependent ellipsometric parameters $ (\psi,{\Delta)}$ are calculated. At the end, the radii of the back focal plane are mapped to the angle of incidence by using a fitted Brewster angle as the reference. The method is validated by simulation and experiments using a homemade angle-resolved ellipsometer and a commercial spectroscopic ellipsometer. The results show that the proposed method provides a 75% error reduction approximately from generally used methods.