Abstract

Piezoelectric micropositioning systems (PMSs) have been widely utilized in the high-precision manipulation applications, but are also subjected to undesired nonlinearities, like hysteresis, and parameter uncertainties. To solve this problem, this paper proposes a new robust sliding mode control scheme for a class of nonlinear PMSs with time-varying uncertainties. Different from the conventional sliding mode control (SMC), the proposed controller further combines the Fourier series-based function estimation technique, fuzzy logic system and adaptive learning algorithm to realize online estimation and compensation of system time-varying uncertainties without their boundary information. The adaptive laws of Fourier coefficients and fuzzy adjustable parameters are obtained via the Lyapunov stability theory. Compared with the existing SMC methods, the proposed control effectively eliminates the control chattering problem, and guarantees the convergence of the tracking error in finite time in the presence of time-varying uncertainties. Theoretical analysis and numerical simulation results show that the proposed control strategy can meet the high-speed, high-precision robust tracking performance requirements of PMSs for micro/nano-manipulation applications.

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