Robust Defect Size Measurement Using 3D Modeling for LCD Defect Detection in Automatic Vision Inspection System

Abstract

LCD Automatic Vision Inspection (AVI) systems automatically detect defect features and measure their sizes via camera vision. AVI systems usually report different measurements on the same defect with some variations on position or rotation mainly because we get different images. This is caused by possible variations in the image acquisition process including optical factors, non-uniform illumination, random noise, and so on. For this reason, conventional area based defect measuring method has some problems in terms of robustness and consistency. In this paper, we propose a new defect size measuring method to overcome these problems. We utilize volume information which is completely ignored in the area based conventional defect measuring method. We choose a bell shape as a defect model for experiment. The results show that our proposed method dramatically improves robustness of defect size measurement. Given proper modeling, the proposed volume based measuring method can be applied to various types of defect for better robustness and consistency.