Robust control strategies for a two‐stage soft‐switching heating power supply of silicon growth furnace

Abstract

As a key element of the silicon growth furnace, the heating power supply plays an important role to form the required thermal field for mono-silicon growth. The performance of the heating power supply system is critical to implement the function, which is determined by both hardware topology and control strategies. In this paper, a novel two-stages soft-switching power supply topology is employed to improve the efficiency of the power supply system. Meanwhile, the robust control methods are proposed for both stages converter to achieve high power factor (PF), low total harmonic distortion (THD) and stable output DC voltage under parameters uncertainty or load perturbation. The simulation and experiment results show the correctness of analysis and the effectiveness of the proposed methods. The robust control strategies combined with the advanced soft switching topology improve the system performance for the practical applications.