Abstract
A continuing trend these days is the use of micro-electro-mechanical actuators with electronic circuitry to fab- ricate MEMS devices such as micro-switches, hard disks, optical micro-mirrors ... One of the problems with the electro- static MEMS actuator is that when an electrical voltage is applied to these devices, the micro-actuators undergo a residual vibration before reaching their permanent position. This paper addresses the control of an electrostatic microelectrome- chanical actuator to reduce the vibration effect on its performance. A feedback linearization controller, a static sliding mode controller and a dynamic sliding mode controller are designed for the microelectromechanical system. The stability of the closed loop system is proved. Simulation results indicate that the proposed control schemes work well.
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a callDisclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.
